LOGO
ABOUT
About I TECH U
Business
Partners
Contact
TECHNOLOGY
About ALD
2D Materials
Oxides
Nitrides and Metals
PRODUCTS
Simple ALD
High temperature ALD
Classic ALD
Special ALD
SERVICE
Thin Film Deposition
Equipment Modulation
Technical Consultancy
SUPPORT
Support
KOR
menubar
menubar
menubar
KOR
ABOUT
About I TECH U
Business
Partners
Contact
TECHNOLOGY
About ALD
2D Materials
Oxide
Nitrides and Metals
PRODUCTS
Simple ALD
High temperature ALD
Classic ALD
Special ALD
SERVICE
Thin film Deposition
Equipment Modulation
Technical Consultancy
SUPPORT
SUPPORT
Oxides
SiO
2
, Al
2
O
3
, HfO
2
, ZrO
2
, TiO
2
, Ta
2
O
5
, ZrO
2
, Pr
2
O
3
, SnO
2
, NiO
MoO
3
, WO
3
, CeO
2
,Y
2
O
3
, Dy
2
O
3
, La
2
O
3
, Er
2
O
3
, MgO, ZnO …
Nitrides
HfN, SiNx , ZrN , TiN, TaN …
Pure Metals
Pt, Ni, Co…
2D materials
MoS
2
, WS
2
, WSe
2
, Graphene , C …
*Available for attaching loadlock chamber.