
Geim et al, Nature, 499, 419-425, (2013)
New materials for advanced application beyond graphene
- Transition Metal Dichalcogenides (TMDCs)
Applications
Photodiode

CH. Lee et al, Nature nanotech, 9, 676, (2014)
Logic circuits

H. Wang et al, Nano Lett,, 12(9), 4674–4680, (2012)
Gas sensor

F. K. Perkins et al, Nano Lett, 13(2), 668-673, (2013)
Catalyst

Thomas F. Jaramillo et al, Science, 317, 100-102, (2007)
- Various applications using TMDCs → Optoelectronic, Electronic, Energy, etc…
- Research about 2D material is rapidly increasing
Synthesis & Equipment
ALD based 2D TMDCs

CVD based 2D TMDCs

- ALD based process is advantageous for control of the layer number.
- I TECH U has excellent ALD 2D material process technique. (MoS2, WS2, WSe2 etc…)
- High synthesis temperature > 500 °C
- High temperature device is required for 2D material process
- I TECH U has superior technique producing high temperature ALD device
(Over 500 ℃ )