In Semiconductor

  • ALD Ni & Silicidation

  • PE-ALD Co & Silicidation

  • ALD of nanocontact metal for VLSI semiconductor circuit BEOL
  • Contact resistance by Silicidation effect

In Sensor

  • Metal ALD on Carbon Nanotubes

  • Ni ALD for Glucose Biosensor

  • Development of next generation sensor active material by applying ALD technique on carbon nano material (CNT, Graphene)